| Research Title |
Optimization of carbon uniformity for diamond-like carbon coating |
| Date of Distribution |
22 January 2017 |
| Conference |
| Title of the Conference |
ICASE2017 |
| Organiser |
Department of Material Science, Chulalongkorn University |
| Conference Place |
Regent's International College |
| Province/State |
Bangkok |
| Conference Date |
19 January 2017 |
| To |
22 January 2017 |
| Proceeding Paper |
| Volume |
1 |
| Issue |
1 |
| Page |
15 |
| Editors/edition/publisher |
United Agencies, Mangalore - 575 002 |
| Abstract |
Diamond-like carbon (DLC) coating is a method to improve quality of materials in mechanical and electrical property. Nowadays, Diamond-like carbon coating technique is famous in semiconductor and automotive. Now many scientist and researcher try to improve coating uniformity performance for developing to support new product in semiconductor industry. This project demonstrates the improvement of DLC uniformity with pulse filtered cathodic arc (PFCA) machine. DOE was used for parameter optimization that give the carbon non-uniformity and analysis data by one-way ANOVA for determining critical parameters that concerned with carbon uniformity. DCTA and fixture rotation velocity were two parameters for DLC uniformity optimization. The result showed that that carbon uniformity was strongly related to DCTA setting, especially at +5 degree giving the best carbon uniformity. |
| Author |
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| Peer Review Status |
มีผู้ประเมินอิสระ |
| Level of Conference |
นานาชาติ |
| Type of Proceeding |
Abstract |
| Type of Presentation |
Oral |
| Part of thesis |
true |
| Presentation awarding |
false |
| Attach file |
|
| Citation |
0
|
|
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Publication
Journal Publication
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